Profile: Brookhaven Instruments Corporation is a supplier of solid-state scan amplifiers and various types of dose controllers used in ion implanters. We also manufacture current integrators used in particle accelerators. The model 1000C digitizing current integrator accepts pulsed or continuous currents of either polarity, ranging from a small fraction of a nanoampere to 20 milliamperes. The integrator provides a series of digital output pulses whose number is proportional to the accumulated quantity of charge. The Dosemaster 100 and 350 dose controllers are current integrators designed specifically for controlling the amount of dose applied to a wafer by an ion implanter during the semiconductor manufacturing process. These dose controllers ensure repeatable dose measurement accuracy to +/- 0.02% of full-scale +/- 30pA at 25°C.
4 Products/Services (Click for related suppliers)
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• | Amplifiers | • | Controllers | • | Integrators |
• | Process Control Instruments |