Description:
Franke bearing assemblies for chip production are offered by Neelkamal Agency. The bearing is used for the illumination optics of a wafer stepper. For the manufacturing of precise chip structures, an exact axial and radial accuracy as well as a high stiffness of the bearing are required. Ceramic-balls and Tefloncage as well as a use of special grease assure the demanded suitability for clean rooms.