Profile: Denton Vacuum, LLC designs and manufactures thin film deposition systems. We also offer fully automated modular in-line systems. The Explorer series plasma-enhanced chemical vapor deposition (PECVD) system is configurable for sputtering, PVD or PECVD applications. It accepts up to 10" substrates. The Helios series plasma-enhanced chemical vapor deposition (PECVD) system accepts up to 39" substrates and has chamber sizes up to 44".
3 Products/Services (Click for related suppliers)
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• | Chemical Vapor Deposition | • | Industrial Machineries | • | Modular Deposition Systems |