Profile: FEI Company produces electron microscopes for nanoscale research. Our products include scanning electron microscopes, transmission electron microscopes, focused ion beam systems and components. Our scanning electron microscopes (SEM) are used for inspecting topographies of materials with a magnification range encompassing optical microscopy and extending to the nanoscale. They can scan the surface of a sample with a finely focused electron beam to produce an image from the beam-specimen interactions detected by a wide array of detectors. Our DualBeam™ (FIB/SEM) systems are designed to deliver integrated sample preparation and micro-analysis below 1nm. The CLM-3D 300 mm DualBeam is a full wafer auto-loading system for automated, digital 3D analysis of semiconductor devices. It combines electron column and high-current ion column to provide high precision cross-sectional metrology.