Profile: InnoLas Semiconductor GmbH specializes in developing & manufacturing laser systems for wafer marking, and machines for wafer sorting & inspection for the semi conductor industry. The IL C 3000 is a marking system including a mini-environment. The system allows fully automated laser marking of polished 300 mm wafers in FOUP cassettes using our debris free processing techniques. The integrated mini-environment has an ionization unit, and the flow is controlled by a differential pressure sensor. The two stations may be loaded by operators, or via an OHT (over head transport) system following the SEMI E84 standard. The wafers can be marked on the front and backside.