Profile: LOT-Oriel UK specializes in supplying surface analysis, spectroscopy and imaging instrumentation products. T-Solar™ is a special intensity optimized M-2000, addresses the measurement requirements on textures Si wafer surfaces. Using the intensity optimizer, the intensity of the light source can be adjusted for all kind of samples, even if rough, scattering textured Si wafers or ideally smooth mirror surfaces should be measured. The T-Solar features a sample tilting stage. Mono crystalline textured Si wafers with pyramid structures could be aligned in respect of the pyramid facets to determine thickness and optical constants of the SiNx layers even with such samples. Camera system includes line array cameras, focal plane array cameras, high speed camera.
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• | Micro Engineering | • | Surface Profilers |