Profile: MEI, LLC specializes in automated and semi-automated wet process systems & services. Our product categories are semiconductor wet benches, solar wafer cleaning, poly-silicon cleaning and chemical delivery systems. Our Evolution series semiconductor & MEM wet benches are designed for dry in and dry out batch wafer processing of multiple lots of wafers from 100mm to 300mm. They are in-line, configurable, automated linear batch immersion wet process systems made for high throughput. Our Advancer series wet processing system is a semi-automated, front to back, side mount robotic wet bench, suitable for etch, strip and clean steps in semiconductor processing. They are bulk chemical ready and incorporate chemical spiking, software programmable in-tank blending of chemistries with quick dump rinse tanks.
2 Products/Services (Click for related suppliers)
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• | Chemical Delivery Equipment | • | Wet Processing Equipment |