Profile: Modular Process Technology Corp. manufactures semiconductor equipments of rapid thermal processing systems, hybrid UV-RTP systems and stand-alone UV ozone cleaning systems. We supply RTP-3000autoloader, a production susceptor solution for the compound semiconductor sector, the RTP-800S for pilot production, the RTP-600S for process monitoring & process development and the UV-RTP & UV stand alone systems.
6 Products/Services (Click for related suppliers)
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• | advanced gas handling system | • | Industrial Machinery | • | Rapid Thermal Annealing System |
• | Rapid Thermal Processing Production System | • | Rapid Thermal Processing System | • | Semiconductors |