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Rocky Mountain Vacuum Tech, Inc.

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Contact: Roger Woo - Sales Consultant
Web: http://www.rmvac.com
E-Mail:
Address: 14 Inverness Drive East, Suite C-132, Englewood, Colorado 80112, USA
Phone: +1-(720)-579-2408 | Fax: +1-(303)-799-5882 | Map/Directions >>
 
 

Profile: Rocky Mountain Vacuum Tech, Inc. is specialized in the development of vacuum system for semiconductor device fabrication. We are an ISO 9001 certified company. Our main products are vacuum deposition systems (PVD, CVD), etcher, cleaning system for R&D and device mass production, thermal process & customized vacuum systems. We produce vacuum systems for faster & more convenient process and develop fully automatic systems for device mass production. An evaporator uses an electric resistance heater or high-energy beam to melt the material and raise its vapor pressure to a useful range. This is done in a high vacuum, both to allow the vapor to reach the substrate without reacting with or scattering against other gas-phase atoms in the chamber, and reduce the incorporation of impurities of from the residual gas in the vacuum chamber. Our evaporation system is capable of fabricating multi-layer thin films by applying co-deposition system. Rapid thermal processing (or RTP) refers to a semiconductor manufacturing process which heats silicon wafers to high temperatures (up to 1100°C or greater) on a timescale of several seconds or less under different atmospheric conditions such as oxygen or nitrogen. Our RTP offers the highest rapid thermal annealing (RTA) performance for a wide range of applications with a low cost of ownership. Designed to meet the most stringent requirements of semiconductor technologies and beyond, the RTP module provides the total temperature control necessary for advanced semiconductor manufacturing applications. Our RTP system utilizes an array of unique technical features which provide for optimal uniformity, repeatability and precision previously unachievable in semiconductor manufacturing.

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• Sputtering Systems For Semiconductor Applications• Thermal Evaporator• Thermal Processing
• Thin film Solar Cells• Ultra High Vacuum Sputter• Vacuum Dryers

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