Wet scrubber is a simple method to clean exhaust air or exhaust gas and remove toxic or smelling compounds. They are more effective when the water drop size gets smaller and the total surface between water or washing fluid and the gas gets larger. The water or washing fluid is recirculated normally in order to save water and reduce the amount of wastewater. Wet scrubbers are used in the semiconductor industry for the removal of TEOS (Tetraethoxysilane), TiCl4 Titan tetrachloride or HMDSO (Hexamethyldisiloxane) from the exhaust gas. A wet scrubber can be combined with other flue gas cleaning methods. They are also used in treating industrial process gas streams, removing sub-micron and larger particulate, acid gases, odors, fumes and vapors.