Profile: Yeagle Technology, Inc. manufactures & re-manufactures PVD, CVD and PECVD vacuum systems. Our systems are available in bell jars, box coaters, load-lock, inline, and batch. Variety of sources can be installed, such as electron beam sources, thermal sources, ion sources, and magetron, or diode cathodes (RF or DC). The SCR30 power control module features all solid-state circuitry for precise power control and reliability. The SCR30 provides 7 kW of power to resistive deposition sources, substrate heaters, or similar devices requiring controllable power inputs. We offer a complete line of electrical, fluid, and rotary feedthroughs. All feedthroughs are leak tested to 1 X 10-8 torr for performance in high vacuum systems.