Vibration actuator consists of a drive section having a coil placed in a cavity of a magnetic circuit, a vibrator driven by the drive section, a spacer made such that its end portion supports a peripheral edge portion of the vibrator, and an external plate. A vibrator actuator provides a drive force by vibrating a vibration element in response to an input signal. The vibration element includes a piezoelectric element which imparts vibration to the vibration element in response to an electrical signal. The vibration element is in compressive contact with and moves with respect to a relative moving member. The relative moving member may be planar, circular or toroidal. The relative moving member has first and second surfaces with said first surface being an adherent material removal surface.